- Sprache
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Englisch
- Anmerkungen
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Dresden, Techn. Univ., Diss., 2004
- Identifier
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974939080
Thema
Dünne Schicht ; Flash-Speicher ; Nanostrukturiertes Material ; Silicium ; Siliciumoxide ; Sputtern ; Dünne Schicht ; Flash-Speicher ; Nanostrukturiertes Material ; Silicium ; Siliciumoxide ; Sputtern; Hochschulschrift
Beteiligte Personen und Organisationen
- URN
- Rechteinformation
-
Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Letzte Aktualisierung
-
26.01.2023, 13:53 MEZ
Objekttyp
- Monografie
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