Monografie
Investigation of organometallic precursors for electron-/ion-induced processing in UHV
- Sprache
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Englisch
- Identifier
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1275711723
Thema
Dünne Schicht; Kristallfläche; Nanostrukturiertes Material; CVD-Verfahren; Silicium; Kupfer; Oberflächenanalyse
Beteiligte Personen und Organisationen
Bilgilisoy, Elif
Libuda, Jörg
Marbach, Hubertus
Libuda, Jörg
Marbach, Hubertus
- URN
- Rechteinformation
-
Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Letzte Aktualisierung
-
02.05.2023, 09:12 MESZ
Objekttyp
- Monografie
Beteiligte
- Bilgilisoy, Elif
- Libuda, Jörg
- Marbach, Hubertus
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