Hochschulschrift
Electron microscopy characterization of manganese silicide layers on silicon
- Location
-
Deutsche Nationalbibliothek Frankfurt am Main
- Extent
-
Online-Ressource
- Language
-
Englisch
- Notes
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Chemnitz, Techn. Univ., Diss., 2003
- Keyword
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Durchstrahlungselektronenmikroskopie
Mangansilicide
Dünne Schicht
Epitaxie
Silicium
Kristallfläche
Durchstrahlungselektronenmikroskopie ; Mangansilicide ; Epitaxie ; Template ; Dünne Schicht ; Silicium
- Creator
- URN
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urn:nbn:de:swb:ch1-200300523
- Rights
-
Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Last update
-
25.03.2025, 1:45 PM CET
Data provider
This object is provided by:
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Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Object type
- Hochschulschrift
Associated
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