Monografie
Observation and modeling of electromigration-induced void growth in Al-based interconnects
- Sprache
-
Englisch
- Identifier
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1049804554
Thema
Aluminium ; Rasterelektronenmikroskopie ; Stromkreis
Beteiligte Personen und Organisationen
- URN
- Rechteinformation
-
Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Letzte Aktualisierung
-
26.01.2023, 13:53 MEZ
Objekttyp
- Monografie
Beteiligte
- Kraft, Oliver
- Bader, S.
- Sanchez, J. E.
- Arzt, Eduard
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