Wafer bonding technologies for nano-, micro- and macro-system realization and integration
- Location
-
Deutsche Nationalbibliothek Frankfurt am Main
- Extent
-
Online-Ressource, 13 Seiten
- Language
-
Englisch
- Notes
-
In: Engineering for a Changing World
In: Ilmenau Scientific Colloquium. Technische Universität Ilmenau ; 60 (Ilmenau) : 2023.09.04-08
In: ilmedia, Ilmenau
- Classification
-
Elektrotechnik, Elektronik
- Event
-
Veröffentlichung
- (where)
-
Ilmenau
- (who)
-
TU Ilmenau
- (when)
-
2023
- Creator
- URN
-
urn:nbn:de:gbv:ilm1-2023isc-113:5
- Rights
-
Open Access; Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Last update
-
14.08.2025, 11:02 AM CEST
Data provider
This object is provided by:
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Associated
- Knechtel, Roy
- Schwarz, Uwe
- TU Ilmenau
Time of origin
- 2023
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Entwicklung von GaInP/GaAs/Si-Mehrfachsolarzellen mittels Wafer-Bonding
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