Metastable cubic transition metal aluminium nitride and oxynitride coatings: Theoretical phase stability and defect structure predictions and verification by industrial-scale growth experiments
- Standort
-
Deutsche Nationalbibliothek Frankfurt am Main
- Umfang
-
Online-Ressource
- Sprache
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Englisch
- Anmerkungen
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RWTH Aachen University, Dissertation, 2017
- Schlagwort
-
Titannitrid
Aluminiumnitrid
Mischkristall
Phasengleichgewicht
Ab-initio-Rechnung
Titanverbindungen
Aluminiumverbindungen
Oxidnitride
Schichtwachstum
PVD-Verfahren
Lichtbogen
Hochleistungsimpulsmagnetronsputtern
Coatings
Aluminum
Plasma density
- Ereignis
-
Veröffentlichung
- (wo)
-
Aachen
- (wer)
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Universitätsbibliothek der RWTH Aachen
- (wann)
-
2017
- Urheber
- Beteiligte Personen und Organisationen
- DOI
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10.18154/RWTH-2017-08939
- URN
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urn:nbn:de:101:1-2018070910470682585105
- Rechteinformation
-
Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Letzte Aktualisierung
-
25.03.2025, 13:45 MEZ
Datenpartner
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Beteiligte
- Hans, Marcus
- Schneider, Jochen M.
- Mitterer, Christian
- Universitätsbibliothek der RWTH Aachen
Entstanden
- 2017
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