Monografie
Metastable cubic transition metal aluminium nitride and oxynitride coatings: Theoretical phase stability and defect structure predictions and verification by industrial-scale growth experiments
- Sprache
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Englisch
- Identifier
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1162451203
Thema
Titannitrid ; Aluminiumnitrid ; Mischkristall ; Phasengleichgewicht ; Ab-initio-Rechnung ; Titanverbindungen ; Aluminiumverbindungen ; Oxidnitride ; Schichtwachstum ; PVD-Verfahren ; Lichtbogen ; Hochleistungsimpulsmagnetronsputtern ; Coatings; Aluminum; Plasma density
Beteiligte Personen und Organisationen
- DOI
-
10.18154/RWTH-2017-08939
- URN
- Rechteinformation
-
Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Letzte Aktualisierung
-
26.01.2023, 13:56 MEZ
Objekttyp
- Monografie
Beteiligte
- Hans, Marcus
- Schneider, Jochen M.
- Mitterer, Christian
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