Control over the Phase Formation in Metastable Transition Metal Nitride Thin Films by Tuning the Al+ Subplantation Depth
- Standort
-
Deutsche Nationalbibliothek Frankfurt am Main
- Umfang
-
Online-Ressource
- Sprache
-
Englisch
- Erschienen in
-
In: 10.3390/coatings9010017
- Ereignis
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Veröffentlichung
- (wo)
-
Aachen
- (wer)
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Universitätsbibliothek der RWTH Aachen
- (wann)
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2019
- Urheber
- DOI
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10.18154/RWTH-2019-00059
- URN
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urn:nbn:de:101:1-2019082607521675339956
- Rechteinformation
-
Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Letzte Aktualisierung
-
25.03.2025, 13:43 MEZ
Datenpartner
Dieses Objekt wird bereitgestellt von:
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Beteiligte
- Greczynski, Grzegorz
- Mráz, Stanislav
- Hans, Marcus
- Lu, Jun
- Hultman, Lars
- Schneider, Jochen M.
- Universitätsbibliothek der RWTH Aachen
Entstanden
- 2019
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