Hochschulschrift
Metastable cubic transition metal aluminium nitride and oxynitride coatings: Theoretical phase stability and defect structure predictions and verification by industrial-scale growth experiments
- Location
-
Deutsche Nationalbibliothek Frankfurt am Main
- Extent
-
Online-Ressource
- Language
-
Englisch
- Notes
-
RWTH Aachen University, Dissertation, 2017
- Keyword
-
Titannitrid
Aluminiumnitrid
Mischkristall
Phasengleichgewicht
Ab-initio-Rechnung
Titanverbindungen
Aluminiumverbindungen
Oxidnitride
Schichtwachstum
PVD-Verfahren
Lichtbogen
Hochleistungsimpulsmagnetronsputtern
Coatings
Aluminum
Plasma density
- Event
-
Veröffentlichung
- (where)
-
Aachen
- (who)
-
Universitätsbibliothek der RWTH Aachen
- (when)
-
2017
- Creator
- Contributor
- DOI
-
10.18154/RWTH-2017-08939
- URN
-
urn:nbn:de:101:1-2018070910470682585105
- Rights
-
Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Last update
-
15.08.2025, 7:33 AM CEST
Data provider
This object is provided by:
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Object type
- Hochschulschrift
Associated
- Hans, Marcus
- Schneider, Jochen M.
- Mitterer, Christian
- Universitätsbibliothek der RWTH Aachen
Time of origin
- 2017
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