On the chemical composition of TiAlN thin films : Comparison of ion beam analysis and laser-assisted atom probe tomography with varying laser pulse energy
- Standort
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Deutsche Nationalbibliothek Frankfurt am Main
- Umfang
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Online-Ressource
- Sprache
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Englisch
- Erschienen in
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In: 10.1016/j.tsf.2019.04.026
- Ereignis
-
Veröffentlichung
- (wo)
-
Aachen
- (wer)
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Universitätsbibliothek der RWTH Aachen
- (wann)
-
2019
- Urheber
- DOI
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10.18154/RWTH-2019-08307
- URN
-
urn:nbn:de:101:1-2020110916152291739050
- Rechteinformation
-
Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Letzte Aktualisierung
-
15.08.2025, 07:20 MESZ
Datenpartner
Dieses Objekt wird bereitgestellt von:
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Beteiligte
- Hans, Marcus
- Schneider, Jochen M.
- Universitätsbibliothek der RWTH Aachen
Entstanden
- 2019
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