Monografie
Influence of defects on the phase stability of arc evaporated cubic titanium aluminum nitride and oxynitride coatings
- Sprache
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Englisch
- Identifier
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1274675510
- Reihe
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Aachen : RWTH Aachen University, 2022 (Materials chemistry dissertation; 39 (2022))
Thema
PVD-Verfahren; Dünne Schicht; Titannitrid; Schichtwachstum; Beschichten; Aluminiumoxide
Beteiligte Personen und Organisationen
- DOI
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10.18154/RWTH-2022-08998
- URN
- Rechteinformation
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Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Letzte Aktualisierung
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02.05.2023, 09:12 MESZ
Objekttyp
- Monografie
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