Influence of point defects on the elastic properties and phase stability of cubic binary and ternary transition metal (aluminum) nitride thin films
- Standort
-
Deutsche Nationalbibliothek Frankfurt am Main
- Umfang
-
Online-Ressource
- Sprache
-
Englisch
- Anmerkungen
-
Rheinisch-Westfälische Technische Hochschule Aachen, Dissertation, 2023
- Schlagwort
-
Dünne Schicht
Magnetronsputtern
PVD-Verfahren
Schichtwachstum
Aluminiumoxide
Titannitrid
- Ereignis
-
Veröffentlichung
- (wo)
-
Aachen
- (wer)
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Universitätsbibliothek der RWTH Aachen
- (wann)
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2023
- Urheber
- Beteiligte Personen und Organisationen
- DOI
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10.18154/RWTH-2023-06577
- URN
-
urn:nbn:de:101:1-2023090801360612827266
- Rechteinformation
-
Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Letzte Aktualisierung
-
14.08.2025, 10:55 MESZ
Datenpartner
Dieses Objekt wird bereitgestellt von:
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Beteiligte
- Karimi Aghda, Soheil
- Schneider, Jochen M.
- Anders, Andre
- Universitätsbibliothek der RWTH Aachen
Entstanden
- 2023
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