Influence of point defects on the elastic properties and phase stability of cubic binary and ternary transition metal (aluminum) nitride thin films
- Location
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Deutsche Nationalbibliothek Frankfurt am Main
- Extent
-
Online-Ressource
- Language
-
Englisch
- Notes
-
Rheinisch-Westfälische Technische Hochschule Aachen, Dissertation, 2023
- Keyword
-
Dünne Schicht
Magnetronsputtern
PVD-Verfahren
Schichtwachstum
Aluminiumoxide
Titannitrid
- Event
-
Veröffentlichung
- (where)
-
Aachen
- (who)
-
Universitätsbibliothek der RWTH Aachen
- (when)
-
2023
- Creator
- Contributor
- DOI
-
10.18154/RWTH-2023-06577
- URN
-
urn:nbn:de:101:1-2023090801360612827266
- Rights
-
Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Last update
- 14.08.2025, 10:55 AM CEST
Data provider
This object is provided by:
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Associated
- Karimi Aghda, Soheil
- Schneider, Jochen M.
- Anders, Andre
- Universitätsbibliothek der RWTH Aachen
Time of origin
- 2023
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