Hochschulschrift

Synthesis of silicon nanocrystal memories by sputter deposition

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Location: Deutsche Nationalbibliothek Frankfurt am Main

Extent: Online-Ressource

Language: Englisch

Notes: In: Wissenschaftlich-Technische Berichte / Forschungszentrum Rossendorf; FZR-425 2005

Bibliographic citation: Wissenschaftlich-technische Berichte ; FZR-425

Keyword: Dünne Schicht
Flash-Speicher
Nanostrukturiertes Material
Silicium
Siliciumoxide
Sputtern
Dünne Schicht ; Flash-Speicher ; Nanostrukturiertes Material ; Silicium ; Siliciumoxide ; Sputtern

Event: Veröffentlichung

(where): Dresden, Dresden

(who): Forschungszentrum Dresden, Forschungszentrum Rossendorf

(when): 2010

Creator: Schmidt, Jan-Uwe

URN: urn:nbn:de:bsz:d120-qucosa-28765

Rights: Der Zugriff auf das Objekt ist unbeschränkt möglich.

Last update: 25.03.20242024, 1:49 PM CET

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Object type

Hochschulschrift

Associated

Schmidt, Jan-Uwe
Forschungszentrum Dresden, Forschungszentrum Rossendorf

Time of origin

2010

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Synthesis of silicon nanocrystal memories by sputter deposition

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Other Objects (12)

Synthesis of silicon nanocrystal memories by sputter deposition

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