Magnetron Sputter Deposition of Amorphous Silicon–SiO 2 Quantized Nanolaminates

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Location: Deutsche Nationalbibliothek Frankfurt am Main

Extent: Online-Ressource

Language: Englisch

Bibliographic citation: Magnetron Sputter Deposition of Amorphous Silicon–SiO 2 Quantized Nanolaminates ; day:22 ; month:07 ; year:2024 ; extent:8
Advanced photonics research ; (22.07.2024) (gesamt 8)

Creator: Thöny, Silvia Schwyn
Bärtschi, Manuel
Batzer, Marietta
Baselgia, Manuel
Gmünder, Raphael
Sharma, Amit
Vermeij, Tijmen
Maeder, Xavier
Waldner, Stephan

DOI: 10.1002/adpr.202400057

URN: urn:nbn:de:101:1-2407231419311.378208096820

Rights: Open Access; Der Zugriff auf das Objekt ist unbeschränkt möglich.

Last update: 14.08.2025, 10:53 AM CEST

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Thöny, Silvia Schwyn
Bärtschi, Manuel
Batzer, Marietta
Baselgia, Manuel
Gmünder, Raphael
Sharma, Amit
Vermeij, Tijmen
Maeder, Xavier
Waldner, Stephan

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Magnetron Sputter Deposition of Amorphous Silicon–SiO 2 Quantized Nanolaminates

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