Bias-plasma Assisted RF Magnetron Sputter Deposition of Hydrogen-less Amorphous Silicon
- Standort
-
Deutsche Nationalbibliothek Frankfurt am Main
- Umfang
-
Online-Ressource
- Sprache
-
Englisch
- Erschienen in
-
In: Energy Procedia ; 84 (2015). - S. 105-109. - eISSN 1876-6102
- Klassifikation
-
Physik
- Ereignis
-
Veröffentlichung
- (wo)
-
Konstanz
- (wer)
-
Bibliothek der Universität Konstanz
- (wann)
-
2016
- Urheber
- URN
-
urn:nbn:de:bsz:352-0-327966
- Rechteinformation
-
Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Letzte Aktualisierung
-
15.06.2025, 05:06 MESZ
Datenpartner
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Beteiligte
- Gerke, Sebastian
- Hahn, Giso
- Job, Reinhart
- Terheiden, Barbara
- Bibliothek der Universität Konstanz
Entstanden
- 2016
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