Hochschulschrift | Online-Publikation

Atomistic effects in reactive direct current sputter deposition

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Location: Deutsche Nationalbibliothek Frankfurt am Main

Extent: Online-Ressource

Language: Englisch

Notes: Aachen, Techn. Hochsch., Diss., 2003

Classification: Physik

Keyword: Zinkoxid
Schichtwachstum
Magnetronsputtern

Creator: Kappertz, Oliver

URN: urn:nbn:de:hbz:82-opus-8005

urn:nbn:de:hbz:82-20040635

Rights: Der Zugriff auf das Objekt ist unbeschränkt möglich.

Last update: 15.08.2025, 7:32 AM CEST

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Hochschulschrift
Online-Publikation

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Kappertz, Oliver

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Atomistic effects in reactive direct current sputter deposition

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Other Objects (12)

Atomistic effects in reactive direct current sputter deposition

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CuInS2 thin films for photovoltaic : RF reactive sputter deposition and characterization

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Synthesis of silicon nanocrystal memories by sputter deposition

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Uranium compounds prepared by sputter deposition: UFe₂₊ₓ

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Upscaling nanoparticle synthesis by sputter deposition in ionic liquids

Magnetron sputter deposition of Ta2O5-SiO2 quantized nanolaminates

Magnetron sputter deposition of nanostructured AlN thin films

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CuInS2 thin films for photovoltaic : RF reactive sputter deposition and characterization

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Electrochromic switching of tungsten oxide films grown by reactive ion-beam sputter deposition

Synthesis of silicon nanocrystal memories by sputter deposition

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Upscaling nanoparticle synthesis by sputter deposition in ionic liquids

Magnetron sputter deposition of Ta2O5-SiO2 quantized nanolaminates

Magnetron sputter deposition of nanostructured AlN thin films

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CuInS2 thin films for photovoltaic : RF reactive sputter deposition and characterization

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Upscaling nanoparticle synthesis by sputter deposition in ionic liquids

Magnetron sputter deposition of Ta2O5-SiO2 quantized nanolaminates

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