Hochschulschrift | Online-Publikation
Atomistic effects in reactive direct current sputter deposition
- Standort
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Deutsche Nationalbibliothek Frankfurt am Main
- Umfang
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Online-Ressource
- Sprache
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Englisch
- Anmerkungen
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Aachen, Techn. Hochsch., Diss., 2003
- Klassifikation
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Physik
- Schlagwort
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Zinkoxid
Schichtwachstum
Magnetronsputtern
- Urheber
- URN
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urn:nbn:de:hbz:82-opus-8005urn:nbn:de:hbz:82-20040635
- Rechteinformation
-
Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Letzte Aktualisierung
-
15.08.2025, 07:32 MESZ
Datenpartner
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Objekttyp
- Hochschulschrift
- Online-Publikation
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