Extreme ultraviolet proximity lithography for fast, flexible and parallel fabrication of infrared antennas
- Location
-
Deutsche Nationalbibliothek Frankfurt am Main
- Extent
-
Online-Ressource
- Language
-
Englisch
- Bibliographic citation
-
In: 10.1364/OE.23.025487
- Classification
-
Elektrotechnik, Elektronik
- Event
-
Veröffentlichung
- (where)
-
Aachen
- (who)
-
Universitätsbibliothek der RWTH Aachen
- (when)
-
2015
- Creator
-
Kunkemöller, Georg
Maß, Tobias W. W.
Michel, Ann-Katrin U.
Kim, Hyun-Su
Brose, Sascha Manuel
Danylyuk, Serhiy
Taubner, Thomas
Juschkin, Larissa
- DOI
-
10.18154/RWTH-2015-05140
- URN
-
urn:nbn:de:101:1-2019082205572058127584
- Rights
-
Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Last update
-
25.03.2025, 1:48 PM CET
Data provider
This object is provided by:
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Associated
- Kunkemöller, Georg
- Maß, Tobias W. W.
- Michel, Ann-Katrin U.
- Kim, Hyun-Su
- Brose, Sascha Manuel
- Danylyuk, Serhiy
- Taubner, Thomas
- Juschkin, Larissa
- Universitätsbibliothek der RWTH Aachen
Time of origin
- 2015
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Vehicular Antennas
Computational proximity lithography with extreme ultraviolet radiation
Interference lithography with extreme ultraviolet light
Investigation of proximity effects in electron microscopy and lithography
Extreme ultraviolet (EUV) sources for lithography based on synchrotron radiation
Mass Spectrometric Investigation of Metal Hydrides relevant to Extreme Ultraviolet Lithography
From the infrared to the ultraviolet and back again
Optical Activation of Germanium Plasmonic Antennas in the Mid-Infrared
160-GHz radar proximity sensor with distributed and flexible antennas for collaborative robots
Lithography.
Top quark and Higgs boson masses : interplay between infrared and ultraviolet physics
Recombination dynamics of clusters in intense extreme-ultraviolet and near-infrared fields
Vehicular Antennas
Computational proximity lithography with extreme ultraviolet radiation
Interference lithography with extreme ultraviolet light
Investigation of proximity effects in electron microscopy and lithography
Extreme ultraviolet (EUV) sources for lithography based on synchrotron radiation
Mass Spectrometric Investigation of Metal Hydrides relevant to Extreme Ultraviolet Lithography
From the infrared to the ultraviolet and back again
Optical Activation of Germanium Plasmonic Antennas in the Mid-Infrared
160-GHz radar proximity sensor with distributed and flexible antennas for collaborative robots
Lithography.
Top quark and Higgs boson masses : interplay between infrared and ultraviolet physics
Recombination dynamics of clusters in intense extreme-ultraviolet and near-infrared fields