Hat mitgewirkt an:
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Auslegung und Charakterisierung einer Nanostrukturierungsanlage für den extrem-ultravioletten Strahlungsbereich
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Interaction of sub-terahertz radiation with low-doped grating-based AlGaN/GaN plasmonic structures. Time-domain spectroscopy measurements and electrodynamic modeling
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Characterization of nanoscale gratings by spectroscopic reflectometry in the extreme ultraviolet with a stand-alone setup
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Computational proximity lithography with extreme ultraviolet radiation