Characterization of nanoscale gratings by spectroscopic reflectometry in the extreme ultraviolet with a stand-alone setup
- Location
-
Deutsche Nationalbibliothek Frankfurt am Main
- Extent
-
Online-Ressource
- Language
-
Englisch
- Bibliographic citation
-
In: 10.1364/OE.396001
- Event
-
Veröffentlichung
- (where)
-
Aachen
- (who)
-
Universitätsbibliothek der RWTH Aachen
- (when)
-
2020
- Creator
-
Bahrenberg, Lukas
Danylyuk, Serhiy
Glabisch, Sven
Ghafoori, Moein
Schröder, Sophia
Brose, Sascha Manuel
Stollenwerk, Jochen Hugo
Loosen, Peter
- DOI
-
10.18154/RWTH-2020-08460
- URN
-
urn:nbn:de:101:1-2021021116125411820666
- Rights
-
Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Last update
-
15.08.2025, 7:33 AM CEST
Data provider
This object is provided by:
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Associated
- Bahrenberg, Lukas
- Danylyuk, Serhiy
- Glabisch, Sven
- Ghafoori, Moein
- Schröder, Sophia
- Brose, Sascha Manuel
- Stollenwerk, Jochen Hugo
- Loosen, Peter
- Universitätsbibliothek der RWTH Aachen
Time of origin
- 2020
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Laser induced dynamic gratings
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Fourier spotting: a novel setup for single-color reflectometry
Surface and thin film analysis by spectroscopic reflectometry with extreme ultraviolet emitting laboratory sources
Extreme ultraviolet reflectometry for structural and optical characterization of thin films and layer systems
The gratings manual
Optomechanical time-domain reflectometry
Laser induced dynamic gratings
Laser interferometry with gratings
Nanoscale polarization transient gratings
2D Gauss Diffraction Gratings
Electromagnetic theory of gratings
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