Mass Spectrometric Investigation of Metal Hydrides relevant to Extreme Ultraviolet Lithography
- Weitere Titel
-
Massenspektrometrische Untersuchung von Metallhydriden im Zusammenhang mit extremer Ultraviolett-Lithographie
- Standort
-
Deutsche Nationalbibliothek Frankfurt am Main
- Umfang
-
Online-Ressource
- Anmerkungen
-
Wuppertal, Bergische Universität Wuppertal, Dissertation, 2024
- Schlagwort
-
Plasmaätzen
- Ereignis
-
Veröffentlichung
- (wo)
-
Wuppertal
- (wer)
-
Universitätsbibliothek
- (wann)
-
2023
- Urheber
- URN
-
urn:nbn:de:hbz:468-2-1758
- Rechteinformation
-
Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Letzte Aktualisierung
-
25.03.2025, 13:50 MEZ
Datenpartner
Dieses Objekt wird bereitgestellt von:
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Beteiligte
- Rieger, Joshua
- Universitätsbibliothek
Entstanden
- 2023
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