Extreme ultraviolet proximity lithography for fast, flexible and parallel fabrication of infrared antennas
- Standort
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Deutsche Nationalbibliothek Frankfurt am Main
- Umfang
-
Online-Ressource
- Sprache
-
Englisch
- Erschienen in
-
In: 10.1364/OE.23.025487
- Klassifikation
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Elektrotechnik, Elektronik
- Ereignis
-
Veröffentlichung
- (wo)
-
Aachen
- (wer)
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Universitätsbibliothek der RWTH Aachen
- (wann)
-
2015
- Urheber
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Kunkemöller, Georg
Maß, Tobias W. W.
Michel, Ann-Katrin U.
Kim, Hyun-Su
Brose, Sascha Manuel
Danylyuk, Serhiy
Taubner, Thomas
Juschkin, Larissa
- DOI
-
10.18154/RWTH-2015-05140
- URN
-
urn:nbn:de:101:1-2019082205572058127584
- Rechteinformation
-
Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Letzte Aktualisierung
-
25.03.2025, 13:48 MEZ
Datenpartner
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Beteiligte
- Kunkemöller, Georg
- Maß, Tobias W. W.
- Michel, Ann-Katrin U.
- Kim, Hyun-Su
- Brose, Sascha Manuel
- Danylyuk, Serhiy
- Taubner, Thomas
- Juschkin, Larissa
- Universitätsbibliothek der RWTH Aachen
Entstanden
- 2015
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