- Weitere Titel
-
Interferenzlithographie mit extrem ultravioletter Strahlung
- Standort
-
Deutsche Nationalbibliothek Frankfurt am Main
- Umfang
-
Online-Ressource
- Sprache
-
Englisch
- Anmerkungen
-
RWTH Aachen University und University of Southampton, Dissertation, 2016
- Klassifikation
-
Physik
- Ereignis
-
Veröffentlichung
- (wo)
-
Aachen
- (wer)
-
Universitätsbibliothek der RWTH Aachen
- (wann)
-
2016
- Urheber
- Beteiligte Personen und Organisationen
- URN
-
urn:nbn:de:hbz:82-rwth-2017-028144
- Rechteinformation
-
Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Letzte Aktualisierung
-
25.03.2025, 13:41 MEZ
Datenpartner
Dieses Objekt wird bereitgestellt von:
Deutsche Nationalbibliothek. Bei Fragen zum Objekt wenden Sie sich bitte an den Datenpartner.
Deutsche Nationalbibliothek. Bei Fragen zum Objekt wenden Sie sich bitte an den Datenpartner.
Beteiligte
- Kim, Hyun-Su
- Juschkin, Larissa
- Taubner, Thomas Günter
- Universitätsbibliothek der RWTH Aachen
Entstanden
- 2016
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