Hochschulschrift | Online-Publikation
Layer transfer of semiconductors and complex oxides by helium and,or hydrogen implantation and wafer bonding
- Standort
-
Deutsche Nationalbibliothek Frankfurt am Main
- Umfang
-
Online-Ressource
- Sprache
-
Englisch
- Anmerkungen
-
Halle (Saale), Univ., Diss., 2003
- Klassifikation
-
Physik
- Schlagwort
-
Galliumarsenid
Dünne Schicht
Übertragung
Ionenimplantation
Wafer
Bonden
Halbleitersubstrat
Beschichten
Metalloxide
Oxidkeramik
- Urheber
- URN
-
urn:nbn:de:gbv:3-000005814
- Rechteinformation
-
Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Letzte Aktualisierung
-
25.03.2025, 13:43 MEZ
Datenpartner
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Objekttyp
- Hochschulschrift
- Online-Publikation
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