Design, fabrication, characterization and reliability study of CMOS-MEMS Lorentz-force magnetometers
- Standort
-
Deutsche Nationalbibliothek Frankfurt am Main
- ISSN
-
2055-7434
- Umfang
-
Online-Ressource
- Sprache
-
Englisch
- Anmerkungen
-
online resource.
- Erschienen in
-
Design, fabrication, characterization and reliability study of CMOS-MEMS Lorentz-force magnetometers ; volume:8 ; number:1 ; day:16 ; month:9 ; year:2022 ; pages:1-25 ; date:12.2022
Microsystems & nanoengineering ; 8, Heft 1 (16.9.2022), 1-25, 12.2022
- Klassifikation
-
Elektrotechnik, Elektronik
- Urheber
-
Valle, J. J.
Sánchez-Chiva, J. M.
Fernández, D.
Madrenas, J.
- Beteiligte Personen und Organisationen
-
SpringerLink (Online service)
- DOI
-
10.1038/s41378-022-00423-w
- URN
-
urn:nbn:de:101:1-2022120309444987917040
- Rechteinformation
-
Open Access; Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Letzte Aktualisierung
-
15.08.2025, 07:34 MESZ
Datenpartner
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Beteiligte
- Valle, J. J.
- Sánchez-Chiva, J. M.
- Fernández, D.
- Madrenas, J.
- SpringerLink (Online service)
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