Post-CMOS processing challenges and design developments of CMOS-MEMS microheaters for local CNT synthesis
- Location
-
Deutsche Nationalbibliothek Frankfurt am Main
- Extent
-
1 Online-Ressource.
- Language
-
Englisch
- Bibliographic citation
-
Post-CMOS processing challenges and design developments of CMOS-MEMS microheaters for local CNT synthesis ; volume:9 ; number:1 ; day:6 ; month:11 ; year:2023 ; pages:1-15 ; date:12.2023
Microsystems & nanoengineering ; 9, Heft 1 (6.11.2023), 1-15, 12.2023
- Classification
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Elektrotechnik, Elektronik
- Creator
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Roy, Avisek
Ta, Bao Q.
Azadmehr, Mehdi
Aasmundtveit, Knut E.
- Contributor
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SpringerLink (Online service)
- DOI
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10.1038/s41378-023-00598-w
- URN
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urn:nbn:de:101:1-2024012309234999547736
- Rights
-
Open Access; Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Last update
-
15.08.2025, 7:32 AM CEST
Data provider
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Associated
- Roy, Avisek
- Ta, Bao Q.
- Azadmehr, Mehdi
- Aasmundtveit, Knut E.
- SpringerLink (Online service)
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