Design, fabrication, characterization and reliability study of CMOS-MEMS Lorentz-force magnetometers
- Location
-
Deutsche Nationalbibliothek Frankfurt am Main
- ISSN
-
2055-7434
- Extent
-
Online-Ressource
- Language
-
Englisch
- Notes
-
online resource.
- Bibliographic citation
-
Design, fabrication, characterization and reliability study of CMOS-MEMS Lorentz-force magnetometers ; volume:8 ; number:1 ; day:16 ; month:9 ; year:2022 ; pages:1-25 ; date:12.2022
Microsystems & nanoengineering ; 8, Heft 1 (16.9.2022), 1-25, 12.2022
- Classification
-
Elektrotechnik, Elektronik
- Creator
-
Valle, J. J.
Sánchez-Chiva, J. M.
Fernández, D.
Madrenas, J.
- Contributor
-
SpringerLink (Online service)
- DOI
-
10.1038/s41378-022-00423-w
- URN
-
urn:nbn:de:101:1-2022120309444987917040
- Rights
-
Open Access; Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Last update
-
15.08.2025, 7:34 AM CEST
Data provider
This object is provided by:
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Associated
- Valle, J. J.
- Sánchez-Chiva, J. M.
- Fernández, D.
- Madrenas, J.
- SpringerLink (Online service)
Other Objects (12)
CMOS-MEMS
CMOS-MEMS
MEMS reliability in shock environments
MEMS capacitive pressure sensor monolithically integrated with CMOS readout circuit by using post CMOS processes
Post-CMOS processing challenges and design developments of CMOS-MEMS microheaters for local CNT synthesis
CMOS voltage-controlled oscillator with high-performance MEMS tunable inductor
Entwicklung eines MEMS Drucksensor-Prozessmoduls für die Post-CMOS Integration
Reliability of MEMS : [testing of materials and devices]
Reliability of MEMS : testing of materials and devices
RF-MEMS switch module in a 0.25 µm BiCMOS technology
Piezoresistive temperature sensors fabricated by a surface micromachining CMOS MEMS process
Packaged BiCMOS embedded RF-MEMS switches with integrated inductive loads
CMOS-MEMS
CMOS-MEMS
MEMS reliability in shock environments
MEMS capacitive pressure sensor monolithically integrated with CMOS readout circuit by using post CMOS processes
Post-CMOS processing challenges and design developments of CMOS-MEMS microheaters for local CNT synthesis
CMOS voltage-controlled oscillator with high-performance MEMS tunable inductor
Entwicklung eines MEMS Drucksensor-Prozessmoduls für die Post-CMOS Integration
Reliability of MEMS : [testing of materials and devices]
Reliability of MEMS : testing of materials and devices
RF-MEMS switch module in a 0.25 µm BiCMOS technology
Piezoresistive temperature sensors fabricated by a surface micromachining CMOS MEMS process
Packaged BiCMOS embedded RF-MEMS switches with integrated inductive loads
CMOS-MEMS
CMOS-MEMS
MEMS reliability in shock environments
MEMS capacitive pressure sensor monolithically integrated with CMOS readout circuit by using post CMOS processes
Post-CMOS processing challenges and design developments of CMOS-MEMS microheaters for local CNT synthesis
CMOS voltage-controlled oscillator with high-performance MEMS tunable inductor
Entwicklung eines MEMS Drucksensor-Prozessmoduls für die Post-CMOS Integration
Reliability of MEMS : [testing of materials and devices]
Reliability of MEMS : testing of materials and devices
RF-MEMS switch module in a 0.25 µm BiCMOS technology
Piezoresistive temperature sensors fabricated by a surface micromachining CMOS MEMS process