Piezoresistive temperature sensors fabricated by a surface micromachining CMOS MEMS process
- Location
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Deutsche Nationalbibliothek Frankfurt am Main
- ISSN
-
2045-2322
- Extent
-
Online-Ressource
- Language
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Englisch
- Notes
-
online resource.
- Bibliographic citation
-
Piezoresistive temperature sensors fabricated by a surface micromachining CMOS MEMS process ; volume:8 ; number:1 ; day:20 ; month:11 ; year:2018 ; pages:1-11 ; date:12.2018
Scientific reports ; 8, Heft 1 (20.11.2018), 1-11, 12.2018
- Classification
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Industrielle und handwerkliche Fertigung
- Creator
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Cai, Chunhua
Tan, Junyan
Hua, Di
Qin, Ming
Zhu, Nianfang
- Contributor
-
SpringerLink (Online service)
- DOI
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10.1038/s41598-018-35113-z
- URN
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urn:nbn:de:101:1-2018123020571220535449
- Rights
-
Open Access; Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Last update
-
14.08.2025, 10:52 AM CEST
Data provider
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Associated
- Cai, Chunhua
- Tan, Junyan
- Hua, Di
- Qin, Ming
- Zhu, Nianfang
- SpringerLink (Online service)
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