A novel evolutionary method for parameter-free MEMS structural design and its application in piezoresistive pressure sensors
- Location
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Deutsche Nationalbibliothek Frankfurt am Main
- Extent
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1 Online-Ressource.
- Language
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Englisch
- Bibliographic citation
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A novel evolutionary method for parameter-free MEMS structural design and its application in piezoresistive pressure sensors ; volume:9 ; number:1 ; day:25 ; month:10 ; year:2023 ; pages:1-8 ; date:12.2023
Microsystems & nanoengineering ; 9, Heft 1 (25.10.2023), 1-8, 12.2023
- Creator
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Meng, Qinggang
Wang, Junbo
Chen, Deyong
Chen, Jian
Xie, Bo
Lu, Yulan
- Contributor
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SpringerLink (Online service)
- DOI
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10.1038/s41378-023-00596-y
- URN
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urn:nbn:de:101:1-2024020112455063945437
- Rights
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Open Access; Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Last update
-
15.08.2025, 7:19 AM CEST
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Associated
- Meng, Qinggang
- Wang, Junbo
- Chen, Deyong
- Chen, Jian
- Xie, Bo
- Lu, Yulan
- SpringerLink (Online service)
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