Direct bonding of wafers on non-planar optical substrates and bonding energy measurement via the novel κ-method
- Standort
-
Deutsche Nationalbibliothek Frankfurt am Main
- Umfang
-
Online-Ressource, 153 Seiten
- Sprache
-
Englisch
- Anmerkungen
-
Jena, Friedrich-Schiller-Universität Jena, Dissertation, 2024
- Schlagwort
-
Wafer
Bonden
MEMS
Chemische Bindung
Messung
Wafer
- Ereignis
-
Veröffentlichung
- (wo)
-
Jena
- (wer)
-
Friedrich-Schiller-Universität Jena
- (wann)
-
2024
- Urheber
- Beteiligte Personen und Organisationen
- URN
-
urn:nbn:de:gbv:27-dbt-20240605-091452-003
- Rechteinformation
-
Open Access; Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Letzte Aktualisierung
-
14.08.2025, 10:48 MESZ
Datenpartner
Dieses Objekt wird bereitgestellt von:
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Beteiligte
- Birckigt, Pascal
- Zeitner, Uwe Detlef
- Kroker, Stefanie
- Turner, Kevin T.
- Friedrich-Schiller-Universität Jena
Entstanden
- 2024
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