Synchronising optical emission spectroscopy to spokes in magnetron sputtering discharges
- Standort
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Deutsche Nationalbibliothek Frankfurt am Main
- Umfang
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Online-Ressource
- Sprache
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Englisch
- Erschienen in
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In: Plasma sources science and technology, 30, 12, Article 125006, S. 125006-1-125006-16
- Ereignis
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Veröffentlichung
- (wo)
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Bochum
- (wer)
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Ruhr-Universität Bochum
- (wann)
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2021
- Urheber
- URN
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urn:nbn:de:hbz:294-87846
- Rechteinformation
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Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Letzte Aktualisierung
-
15.08.2025, 07:31 MESZ
Datenpartner
Dieses Objekt wird bereitgestellt von:
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Beteiligte
- Maaß, Philipp A.
- Schulz-von der Gathen, Volker
- Keudell, Achim von
- Held, Julian
- Ruhr-Universität Bochum
Entstanden
- 2021
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