Monografie
Transient transport phenomena in high power impulse magnetron sputtering discharges
- Sprache
-
Englisch
- Identifier
-
1240479468
Thema
Magnetron sputtering; Impulse; Transport theory; Hochleistungsimpulsmagnetronsputtern; Magnetronsputtern; Plasmaphysik; Plasmawelle; Plasma
Beteiligte Personen und Organisationen
Held, Julian
Keudell, Achim von
Awakowicz, Peter
Fakultät für Physik und Astronomie
Keudell, Achim von
Awakowicz, Peter
Fakultät für Physik und Astronomie
- URN
- Rechteinformation
-
Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Letzte Aktualisierung
-
26.01.2023, 13:57 MEZ
Objekttyp
- Monografie
Beteiligte
- Held, Julian
- Keudell, Achim von
- Awakowicz, Peter
- Fakultät für Physik und Astronomie
Ähnliche Objekte (12)
Control of aluminium oxide deposition by variable biasing
3D-simulation of impurity transport in a fusion edge plasma by means of a massively parallelized Monte-Carlo code
Fundamental surface processes in HiPIMS plasmas : physics and chemistry at the plasma magnetron target interface
Ion-induced secondary electron emission of plasma-exposed metals
Investigation of an efficient stochastic electron heating mechanism in periodically structured vortex fields
Discharge ignition, dynamics and chemistry of nanosecond pulsed plasmas in water
Fluorocarbon plasma erosion of silica glass doped with aluminum
Thomson scattering on a nanosecond pulsed atmospheric pressure helium micro-discharge
Development of tungsten alloy plasma-facing materials for the fusion power plant
Cross-correlating discharge physics, excitation mechanisms and plasma chemistry to describe the stability of an RF-excited atmospheric pressure argon plasma jet
Erzeugung maßgeschneiderter Ionen-Energieverteilungen in Niederdruckplasmen
The connection between spokes and the energy distribution function of ions in high power impulse magnetron sputtering
Control of aluminium oxide deposition by variable biasing
3D-simulation of impurity transport in a fusion edge plasma by means of a massively parallelized Monte-Carlo code
Fundamental surface processes in HiPIMS plasmas : physics and chemistry at the plasma magnetron target interface
Ion-induced secondary electron emission of plasma-exposed metals
Investigation of an efficient stochastic electron heating mechanism in periodically structured vortex fields
Discharge ignition, dynamics and chemistry of nanosecond pulsed plasmas in water
Fluorocarbon plasma erosion of silica glass doped with aluminum
Thomson scattering on a nanosecond pulsed atmospheric pressure helium micro-discharge
Development of tungsten alloy plasma-facing materials for the fusion power plant
Cross-correlating discharge physics, excitation mechanisms and plasma chemistry to describe the stability of an RF-excited atmospheric pressure argon plasma jet
Erzeugung maßgeschneiderter Ionen-Energieverteilungen in Niederdruckplasmen
The connection between spokes and the energy distribution function of ions in high power impulse magnetron sputtering
Control of aluminium oxide deposition by variable biasing
3D-simulation of impurity transport in a fusion edge plasma by means of a massively parallelized Monte-Carlo code
Fundamental surface processes in HiPIMS plasmas : physics and chemistry at the plasma magnetron target interface
Ion-induced secondary electron emission of plasma-exposed metals
Investigation of an efficient stochastic electron heating mechanism in periodically structured vortex fields
Discharge ignition, dynamics and chemistry of nanosecond pulsed plasmas in water
Fluorocarbon plasma erosion of silica glass doped with aluminum
Thomson scattering on a nanosecond pulsed atmospheric pressure helium micro-discharge
Development of tungsten alloy plasma-facing materials for the fusion power plant
Cross-correlating discharge physics, excitation mechanisms and plasma chemistry to describe the stability of an RF-excited atmospheric pressure argon plasma jet
Erzeugung maßgeschneiderter Ionen-Energieverteilungen in Niederdruckplasmen