Emission pattern of an aluminium nitride target for radio frequency magnetron sputtering
- Standort
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Deutsche Nationalbibliothek Frankfurt am Main
- Umfang
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Online-Ressource
- Sprache
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Englisch
- Erschienen in
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In: Journal of Physics: Conference Series 274 (2011): 012116.
- Ereignis
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Veröffentlichung
- (wo)
-
Erlangen
- (wer)
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Friedrich-Alexander-Universität Erlangen-Nürnberg (FAU)
- (wann)
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2011
- Urheber
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Gálvez de la Puente, G.
Zitzlsberger, S.
Guerra Torres, J. A.
Erlenbach, O.
Weingärtner, R.
De Zela, F.
Winnacker, A.
- Beteiligte Personen und Organisationen
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XVII Reunión Iberoamericana de Óptica (RIAO) & X Encuentro de Óptica, Láseres y Aplicaciones (OPTILAS) 20–24 September 2010, Lima, Peru
- DOI
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10.1088/1742-6596/274/1/012116
- URN
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urn:nbn:de:bvb:29-opus4-185484
- Rechteinformation
-
Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Letzte Aktualisierung
-
15.08.2025, 07:27 MESZ
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Beteiligte
- Gálvez de la Puente, G.
- Zitzlsberger, S.
- Guerra Torres, J. A.
- Erlenbach, O.
- Weingärtner, R.
- De Zela, F.
- Winnacker, A.
- XVII Reunión Iberoamericana de Óptica (RIAO) & X Encuentro de Óptica, Láseres y Aplicaciones (OPTILAS) 20–24 September 2010, Lima, Peru
- Friedrich-Alexander-Universität Erlangen-Nürnberg (FAU)
Entstanden
- 2011
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