Angular distribution of titanium ions and neutrals in high-power impulse magnetron sputtering discharges
- Standort
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Deutsche Nationalbibliothek Frankfurt am Main
- Umfang
-
Online-Ressource
- Sprache
-
Englisch
- Erschienen in
-
In: 10.1116/6.0002555
- Ereignis
-
Veröffentlichung
- (wo)
-
Aachen
- (wer)
-
Universitätsbibliothek der RWTH Aachen
- (wann)
-
2023
- Urheber
-
Renner, M.
Fischer, J.
Hajihoseini, H.
Gudmundsson, J. T.
Rudolph, M.
Lundin, D.
- DOI
-
10.18154/RWTH-2023-05703
- URN
-
urn:nbn:de:101:1-2023061501331556952280
- Rechteinformation
-
Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Letzte Aktualisierung
-
25.03.2025, 13:54 MEZ
Datenpartner
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Beteiligte
- Renner, M.
- Fischer, J.
- Hajihoseini, H.
- Gudmundsson, J. T.
- Rudolph, M.
- Lundin, D.
- Universitätsbibliothek der RWTH Aachen
Entstanden
- 2023
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