Angular distribution of titanium ions and neutrals in high-power impulse magnetron sputtering discharges
- Location
-
Deutsche Nationalbibliothek Frankfurt am Main
- Extent
-
Online-Ressource
- Language
-
Englisch
- Bibliographic citation
-
In: 10.1116/6.0002555
- Event
-
Veröffentlichung
- (where)
-
Aachen
- (who)
-
Universitätsbibliothek der RWTH Aachen
- (when)
-
2023
- Creator
-
Renner, M.
Fischer, J.
Hajihoseini, H.
Gudmundsson, J. T.
Rudolph, M.
Lundin, D.
- DOI
-
10.18154/RWTH-2023-05703
- URN
-
urn:nbn:de:101:1-2023061501331556952280
- Rights
-
Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Last update
-
25.03.2025, 1:54 PM CET
Data provider
This object is provided by:
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Associated
- Renner, M.
- Fischer, J.
- Hajihoseini, H.
- Gudmundsson, J. T.
- Rudolph, M.
- Lundin, D.
- Universitätsbibliothek der RWTH Aachen
Time of origin
- 2023
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Deposition of 3YSZ-TiC PVD coatings with high-power impulse magnetron sputtering (HiPIMS)
Spoke-resolved electron density, temperature and potential in direct current magnetron sputtering and HiPIMS discharges
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Analytic and numerical investigation of high power impulse magnetron sputtering discharges
Deposition of 3YSZ-TiC PVD coatings with high-power impulse magnetron sputtering (HiPIMS)
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Exploring the potential of serial magnetron co-sputtering
An Investigation of Target Poisoning during Reactive Magnetron Sputtering
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