A voting-based ensemble feature network for semiconductor wafer defect classification

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Location: Deutsche Nationalbibliothek Frankfurt am Main

ISSN: 2045-2322

Extent: Online-Ressource

Language: Englisch

Notes: online resource.

Bibliographic citation: A voting-based ensemble feature network for semiconductor wafer defect classification ; volume:12 ; number:1 ; day:28 ; month:9 ; year:2022 ; pages:1-12 ; date:12.2022
Scientific reports ; 12, Heft 1 (28.9.2022), 1-12, 12.2022

Creator: Misra, Sampa
Kim, Donggyu
Kim, Jongbeom
Shin, Woncheol
Kim, Chulhong

Contributor: SpringerLink (Online service)

DOI: 10.1038/s41598-022-20630-9

URN: urn:nbn:de:101:1-2022121621175224841321

Rights: Open Access; Der Zugriff auf das Objekt ist unbeschränkt möglich.

Last update: 15.08.2025, 7:29 AM CEST

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Misra, Sampa
Kim, Donggyu
Kim, Jongbeom
Shin, Woncheol
Kim, Chulhong
SpringerLink (Online service)

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A voting-based ensemble feature network for semiconductor wafer defect classification

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Other Objects (12)

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