A voting-based ensemble feature network for semiconductor wafer defect classification
- Standort
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Deutsche Nationalbibliothek Frankfurt am Main
- ISSN
-
2045-2322
- Umfang
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Online-Ressource
- Sprache
-
Englisch
- Anmerkungen
-
online resource.
- Erschienen in
-
A voting-based ensemble feature network for semiconductor wafer defect classification ; volume:12 ; number:1 ; day:28 ; month:9 ; year:2022 ; pages:1-12 ; date:12.2022
Scientific reports ; 12, Heft 1 (28.9.2022), 1-12, 12.2022
- Urheber
-
Misra, Sampa
Kim, Donggyu
Kim, Jongbeom
Shin, Woncheol
Kim, Chulhong
- Beteiligte Personen und Organisationen
-
SpringerLink (Online service)
- DOI
-
10.1038/s41598-022-20630-9
- URN
-
urn:nbn:de:101:1-2022121621175224841321
- Rechteinformation
-
Open Access; Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Letzte Aktualisierung
-
15.08.2025, 07:29 MESZ
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Beteiligte
- Misra, Sampa
- Kim, Donggyu
- Kim, Jongbeom
- Shin, Woncheol
- Kim, Chulhong
- SpringerLink (Online service)
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