Lloyd's mirror interference lithography with EUV radiation from a high-harmonic source
- Standort
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Deutsche Nationalbibliothek Frankfurt am Main
- Umfang
-
Online-Ressource
- Sprache
-
Englisch
- Erschienen in
-
In: 10.7567/APEX.9.076701
- Ereignis
-
Veröffentlichung
- (wo)
-
Aachen
- (wer)
-
Universitätsbibliothek der RWTH Aachen
- (wann)
-
2016
- Urheber
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Kim, Hyun-su
Baksh, Peter
Odstrčil, Michal
Miszczak, Magdalena
Frey, Jeremy G.
Juschkin, Larissa
Brocklesby, William S.
- DOI
-
10.18154/RWTH-2016-04448
- URN
-
urn:nbn:de:101:1-2018101912022310929523
- Rechteinformation
-
Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Letzte Aktualisierung
-
25.03.2025, 13:43 MEZ
Datenpartner
Dieses Objekt wird bereitgestellt von:
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Beteiligte
- Kim, Hyun-su
- Baksh, Peter
- Odstrčil, Michal
- Miszczak, Magdalena
- Frey, Jeremy G.
- Juschkin, Larissa
- Brocklesby, William S.
- Universitätsbibliothek der RWTH Aachen
Entstanden
- 2016
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