Lloyd's mirror interference lithography with EUV radiation from a high-harmonic source
- Location
-
Deutsche Nationalbibliothek Frankfurt am Main
- Extent
-
Online-Ressource
- Language
-
Englisch
- Bibliographic citation
-
In: 10.7567/APEX.9.076701
- Event
-
Veröffentlichung
- (where)
-
Aachen
- (who)
-
Universitätsbibliothek der RWTH Aachen
- (when)
-
2016
- Creator
-
Kim, Hyun-su
Baksh, Peter
Odstrčil, Michal
Miszczak, Magdalena
Frey, Jeremy G.
Juschkin, Larissa
Brocklesby, William S.
- DOI
-
10.18154/RWTH-2016-04448
- URN
-
urn:nbn:de:101:1-2018101912022310929523
- Rights
-
Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Last update
-
15.08.2025, 7:30 AM CEST
Data provider
This object is provided by:
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Associated
- Kim, Hyun-su
- Baksh, Peter
- Odstrčil, Michal
- Miszczak, Magdalena
- Frey, Jeremy G.
- Juschkin, Larissa
- Brocklesby, William S.
- Universitätsbibliothek der RWTH Aachen
Time of origin
- 2016
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