High Breakdown Voltage and Low Dynamic ON-Resistance AlGaN/GaN HEMT with Fluorine Ion Implantation in SiNx Passivation Layer

Location
Deutsche Nationalbibliothek Frankfurt am Main
ISSN
1556-276X
Extent
Online-Ressource
Language
Englisch
Notes
online resource.

Bibliographic citation
High Breakdown Voltage and Low Dynamic ON-Resistance AlGaN/GaN HEMT with Fluorine Ion Implantation in SiNx Passivation Layer ; volume:14 ; number:1 ; day:4 ; month:6 ; year:2019 ; pages:1-6 ; date:12.2019
Nanoscale research letters ; 14, Heft 1 (4.6.2019), 1-6, 12.2019

Classification
Elektrotechnik, Elektronik

Creator
Yang, Chao
Luo, Xiaorong
Sun, Tao
Zhang, Anbang
Ouyang, Dongfa
Deng, Siyu
Wei, Jie
Zhang, Bo
Contributor
SpringerLink (Online service)

DOI
10.1186/s11671-019-3025-8
URN
urn:nbn:de:101:1-2019092404404698536088
Rights
Open Access; Der Zugriff auf das Objekt ist unbeschränkt möglich.
Last update
15.08.2025, 7:38 AM CEST

Data provider

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Associated

  • Yang, Chao
  • Luo, Xiaorong
  • Sun, Tao
  • Zhang, Anbang
  • Ouyang, Dongfa
  • Deng, Siyu
  • Wei, Jie
  • Zhang, Bo
  • SpringerLink (Online service)

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