- Standort
-
Deutsche Nationalbibliothek Frankfurt am Main
- Umfang
-
Online-Ressource
- Sprache
-
Englisch
- Erschienen in
-
In: Microelectronic Engineering 85 (2008), 2159-2163
- Schlagwort
-
CVD-Verfahren
Elektroniktechnologie
Verkupferung
- Ereignis
-
Veröffentlichung
- (wo)
-
Chemnitz, Chemnitz, Chemnitz, Chemnitz
- (wer)
-
Universitätsbibliothek Chemnitz, Technische Universität Chemnitz, Air Products and Chemicals, Inc., Elsevier B.V.
- (wann)
-
2008
- Urheber
-
Norman, John A. T.
Perez, Melanie
Schulz, Stefan E.
Waechtler, Thomas
- URN
-
urn:nbn:de:bsz:ch1-200801346
- Rechteinformation
-
Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Letzte Aktualisierung
-
25.03.2025, 13:49 MEZ
Datenpartner
Dieses Objekt wird bereitgestellt von:
Deutsche Nationalbibliothek. Bei Fragen zum Objekt wenden Sie sich bitte an den Datenpartner.
Deutsche Nationalbibliothek. Bei Fragen zum Objekt wenden Sie sich bitte an den Datenpartner.
Beteiligte
- Norman, John A. T.
- Perez, Melanie
- Schulz, Stefan E.
- Waechtler, Thomas
- Universitätsbibliothek Chemnitz, Technische Universität Chemnitz, Air Products and Chemicals, Inc., Elsevier B.V.
Entstanden
- 2008
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