Hochschulschrift
Atomic mechanisms of stress formation of group IVB-VIB transition metal nitrides deposited by DC magnetron sputtering
- Standort
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Deutsche Nationalbibliothek Frankfurt am Main
- Umfang
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Online-Ressource
- Sprache
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Englisch
- Anmerkungen
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Aachen, Techn. Hochsch,, Diss., 2007
- Schlagwort
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Spannung ; ZrN ; NbN ; WN ; ZrON ; NbON
- Urheber
- URN
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urn:nbn:de:hbz:82-opus-19354
- Rechteinformation
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Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Letzte Aktualisierung
-
25.03.2025, 13:48 MEZ
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- Hochschulschrift
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