- Location
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Deutsche Nationalbibliothek Frankfurt am Main
- Extent
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Online-Ressource
- Language
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Englisch
- Bibliographic citation
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Sputtering of silicon nanopowders by an argon cluster ion beam ; volume:10 ; pages:135-143
Beilstein journal of nanotechnology ; 10, 135-143
- Classification
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Ingenieurwissenschaften und Maschinenbau
- DOI
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10.3762/bjnano.10.13
- URN
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urn:nbn:de:101:1-2020102908524492349811
- Rights
-
Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Last update
-
15.08.2025, 7:33 AM CEST
Data provider
This object is provided by:
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
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Ion formation in an argon and argon-oxygen gas mixture of a magnetron sputtering discharge
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