Hochschulschrift
Passive triggering of a high power hollow cathode EUV lamp for lithography
- Standort
-
Deutsche Nationalbibliothek Frankfurt am Main
- ISBN
-
9783832249106
3832249109
- Maße
-
21 cm, 225 gr.
- Umfang
-
150 S.
- Sprache
-
Englisch
- Anmerkungen
-
Ill., graph. Darst.
Zugl.: Aachen, Techn. Hochsch., Diss., 2005
- Klassifikation
-
Physik
- Schlagwort
-
Lithografie
Extremes Ultraviolett
Hohlkathodenentladung
Pinch
Lithography
- Inhaltsverzeichnis
- Rechteinformation
-
Bei diesem Objekt liegt nur das Inhaltsverzeichnis digital vor. Der Zugriff darauf ist unbeschränkt möglich.
- Letzte Aktualisierung
-
11.03.2025, 12:11 MEZ
Datenpartner
Dieses Objekt wird bereitgestellt von:
Deutsche Nationalbibliothek. Bei Fragen zum Objekt wenden Sie sich bitte an den Datenpartner.
Deutsche Nationalbibliothek. Bei Fragen zum Objekt wenden Sie sich bitte an den Datenpartner.
Objekttyp
- Hochschulschrift
Beteiligte
- Smith, Christopher Sydney
- Shaker
Entstanden
- 2006
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