Monografie
Enabling control of matter at the atomic level: atomic layer deposition and fluorocarbon-based atomic layer etching
- Sprache
-
Englisch
- Identifier
-
120306683X
- Thema
-
Etching; Atomic layer deposition
- Beteiligte Personen und Organisationen
- URN
- Rechteinformation
-
Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Letzte Aktualisierung
-
26.01.2023, 13:57 MEZ
Datenpartner
Dieses Objekt wird bereitgestellt von:
Deutsche Nationalbibliothek. Bei Fragen zum Objekt wenden Sie sich bitte an den Datenpartner.
Deutsche Nationalbibliothek. Bei Fragen zum Objekt wenden Sie sich bitte an den Datenpartner.
Objekttyp
- Monografie
Beteiligte
- Dallorto, Stefano
- Rangelow, Ivo W.
- Schwartzberg, Adam
- Strehle, Steffen
Ähnliche Objekte (12)
Metastable atomic layer deposition
Atomic Layer Deposition onto Fibers
Chemistry of atomic layer deposition
Atomic layer processing : semiconductor dry etching technology
Atomic Layer Deposition and Microanalysis of Ultrathin Layers
Atomic layer deposition of nanostructured materials
Atomic layer deposition on biological matter
Atomic layer deposition in energy conversion applications
Catalyst synthesis and modification via atomic layer deposition
Plasma-assisted atomic layer deposition for microelectronics applications
Atomic layer deposition of zinc based transparent conductive oxides
Atomic layer deposition for renewable energy conversion and storage
Metastable atomic layer deposition
Atomic Layer Deposition onto Fibers
Chemistry of atomic layer deposition
Atomic layer processing : semiconductor dry etching technology
Atomic Layer Deposition and Microanalysis of Ultrathin Layers
Atomic layer deposition of nanostructured materials
Atomic layer deposition on biological matter
Atomic layer deposition in energy conversion applications
Catalyst synthesis and modification via atomic layer deposition
Plasma-assisted atomic layer deposition for microelectronics applications
Atomic layer deposition of zinc based transparent conductive oxides
Atomic layer deposition for renewable energy conversion and storage
Metastable atomic layer deposition
Atomic Layer Deposition onto Fibers
Chemistry of atomic layer deposition
Atomic layer processing : semiconductor dry etching technology
Atomic Layer Deposition and Microanalysis of Ultrathin Layers
Atomic layer deposition of nanostructured materials
Atomic layer deposition on biological matter
Atomic layer deposition in energy conversion applications
Catalyst synthesis and modification via atomic layer deposition
Plasma-assisted atomic layer deposition for microelectronics applications
Atomic layer deposition of zinc based transparent conductive oxides