Atomic Layer Deposition and Microanalysis of Ultrathin Layers

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Location: Deutsche Nationalbibliothek Frankfurt am Main

Extent: Online-Ressource

Language: Englisch

Keyword: Atomschichtepitaxie
Kohlenstoff-Nanoröhre
Diketonate
Kupfer
Kupferoxide
Metallisierungsschicht
ULSI

Event: Veröffentlichung

(where): Chemnitz

(who): Universitätsbibliothek Chemnitz

(when): 2012

Creator: Melzer, Marcel

Contributor: Wächtler, Thomas
Schulz, Stefan E.
Hietschold, Michael

URN: urn:nbn:de:bsz:ch1-qucosa-97235

Rights: Der Zugriff auf das Objekt ist unbeschränkt möglich.

Last update: 27.02.2025, 1:59 AM CET

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Associated

Melzer, Marcel
Wächtler, Thomas
Schulz, Stefan E.
Hietschold, Michael
Universitätsbibliothek Chemnitz

Time of origin

2012

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Atomic Layer Deposition and Microanalysis of Ultrathin Layers

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Time of origin

Other Objects (12)

Area Selective Deposition of Ultrathin Magnetic Cobalt Films via Atomic Layer Deposition

Metastable atomic layer deposition

Atomic Layer Deposition onto Fibers

Chemistry of atomic layer deposition

Growth Monitoring of Ultrathin Copper and Copper Oxide Films Deposited by Atomic Layer Deposition

Atomic layer deposition of nanostructured materials

Atomic layer deposition on biological matter

Catalyst synthesis and modification via atomic layer deposition

Atomic layer deposition in energy conversion applications

Effective passivation of crystalline silicon surfaces by ultrathin atomic-layer-deposited TiOx layers

Atomic layer deposition for renewable energy conversion and storage

Atomic layer deposition for energy conversion and storage applications

Area Selective Deposition of Ultrathin Magnetic Cobalt Films via Atomic Layer Deposition

Metastable atomic layer deposition

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Chemistry of atomic layer deposition

Growth Monitoring of Ultrathin Copper and Copper Oxide Films Deposited by Atomic Layer Deposition

Atomic layer deposition of nanostructured materials

Atomic layer deposition on biological matter

Catalyst synthesis and modification via atomic layer deposition

Atomic layer deposition in energy conversion applications

Effective passivation of crystalline silicon surfaces by ultrathin atomic-layer-deposited TiOx layers

Atomic layer deposition for renewable energy conversion and storage

Atomic layer deposition for energy conversion and storage applications

Area Selective Deposition of Ultrathin Magnetic Cobalt Films via Atomic Layer Deposition

Metastable atomic layer deposition

Atomic Layer Deposition onto Fibers

Chemistry of atomic layer deposition

Growth Monitoring of Ultrathin Copper and Copper Oxide Films Deposited by Atomic Layer Deposition

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Atomic layer deposition on biological matter

Catalyst synthesis and modification via atomic layer deposition

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Atomic layer deposition for renewable energy conversion and storage

Atomic layer deposition for energy conversion and storage applications

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