Plasma-enhanced atomic layer deposition of binary metal oxides as gas barrier layers on polymers

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Location: Deutsche Nationalbibliothek Frankfurt am Main

Extent: Online-Ressource

Language: Englisch

Notes: Bochum, Ruhr-Universität Bochum, Dissertation, 2017

Classification: Industrielle und handwerkliche Fertigung

Keyword: Polymers
Atomic layer deposition
Metallic oxides
Atomlagenabscheidung
Dünne Schicht
Polymere
Plasma
Metalloxide

Event: Veröffentlichung

(where): Bochum

(who): Ruhr-Universität Bochum

(when): 2018

Creator: Gebhard, Maximilian

Contributor: Devi, Anjana
Awakowitz, Peter
Fakultät für Chemie und Biochemie

URN: urn:nbn:de:hbz:294-58088

Rights: Der Zugriff auf das Objekt ist unbeschränkt möglich.

Last update: 25.03.2025, 1:52 PM CET

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Associated

Gebhard, Maximilian
Devi, Anjana
Awakowitz, Peter
Fakultät für Chemie und Biochemie
Ruhr-Universität Bochum

Time of origin

2018

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Plasma-enhanced atomic layer deposition of binary metal oxides as gas barrier layers on polymers

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Other Objects (12)

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