Low temperature atomic layer deposition of cobalt using dicobalt hexacarbonyl-1-heptyne as precursor
- Standort
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Deutsche Nationalbibliothek Frankfurt am Main
- Umfang
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Online-Ressource
- Sprache
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Englisch
- Erschienen in
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Low temperature atomic layer deposition of cobalt using dicobalt hexacarbonyl-1-heptyne as precursor ; volume:14 ; year:2023 ; pages:951-963
Beilstein journal of nanotechnology ; 14 (2023), 951-963
- Urheber
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Franz, Mathias
Safian Jouzdani, Mahnaz
Kaßner, Lysann
Daniel, Marcus
Stahr, Frank
Schulz, Stefan E.
- DOI
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10.3762/bjnano.14.78
- URN
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urn:nbn:de:101:1-2409261217055.694564742598
- Rechteinformation
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Open Access; Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Letzte Aktualisierung
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15.08.2025, 07:34 MESZ
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Beteiligte
- Franz, Mathias
- Safian Jouzdani, Mahnaz
- Kaßner, Lysann
- Daniel, Marcus
- Stahr, Frank
- Schulz, Stefan E.
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