Area Selective Deposition of Ultrathin Magnetic Cobalt Films via Atomic Layer Deposition

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Location: Deutsche Nationalbibliothek Frankfurt am Main

Extent: Online-Ressource

Language: Englisch

Notes: In: AMC 2015 – Advanced Metallization Conference

Keyword: Atomlagenabscheidung
Dünne Schicht
Cobalt
Ferromagnet
Speicher

Event: Veröffentlichung

(where): Chemnitz, Chemnitz

(who): Universitätsbibliothek Chemnitz, Technische Universität Chemnitz

(when): 2016

Creator: Nallan, Himamshu
Ngo, Thong
Posadas, Agham
Demkov, Alexander
Ekerdt, John

URN: urn:nbn:de:bsz:ch1-qucosa-207142

Rights: Der Zugriff auf das Objekt ist unbeschränkt möglich.

Last update: 25.03.2025, 1:47 PM CET

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Associated

Nallan, Himamshu
Ngo, Thong
Posadas, Agham
Demkov, Alexander
Ekerdt, John
Universitätsbibliothek Chemnitz, Technische Universität Chemnitz

Time of origin

2016

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Area Selective Deposition of Ultrathin Magnetic Cobalt Films via Atomic Layer Deposition

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Other Objects (12)

Atomic Layer Deposition and Microanalysis of Ultrathin Layers

Metastable atomic layer deposition

Atomic Layer Deposition onto Fibers

Chemistry of atomic layer deposition

Growth Monitoring of Ultrathin Copper and Copper Oxide Films Deposited by Atomic Layer Deposition

Atomic layer deposition of nanostructured materials

Atomic layer deposition on biological matter

Miniaturized pH-Sensitive Field-Effect Capacitors with Ultrathin Ta2O5 Films Prepared by Atomic Layer Deposition

Atomic layer deposition in energy conversion applications

Tuning catalysis by surface-deposition of elements on oxidation catalysts via atomic layer deposition

Mechanistic studies of atomic layer deposition on oxidation catalysts – AlOx and POx deposition

Area‐Selective Growth of HfS2 Thin Films via Atomic Layer Deposition at Low Temperature

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Metastable atomic layer deposition

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Chemistry of atomic layer deposition

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Atomic layer deposition of nanostructured materials

Atomic layer deposition on biological matter

Miniaturized pH-Sensitive Field-Effect Capacitors with Ultrathin Ta2O5 Films Prepared by Atomic Layer Deposition

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Tuning catalysis by surface-deposition of elements on oxidation catalysts via atomic layer deposition

Mechanistic studies of atomic layer deposition on oxidation catalysts – AlOx and POx deposition

Area‐Selective Growth of HfS2 Thin Films via Atomic Layer Deposition at Low Temperature

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Chemistry of atomic layer deposition

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Atomic layer deposition of nanostructured materials

Atomic layer deposition on biological matter

Miniaturized pH-Sensitive Field-Effect Capacitors with Ultrathin Ta2O5 Films Prepared by Atomic Layer Deposition

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Mechanistic studies of atomic layer deposition on oxidation catalysts – AlOx and POx deposition

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