Area Selective Deposition of Ultrathin Magnetic Cobalt Films via Atomic Layer Deposition
- Standort
-
Deutsche Nationalbibliothek Frankfurt am Main
- Umfang
-
Online-Ressource
- Sprache
-
Englisch
- Anmerkungen
-
In: AMC 2015 – Advanced Metallization Conference
- Schlagwort
-
Atomlagenabscheidung
Dünne Schicht
Cobalt
Ferromagnet
Speicher
- Ereignis
-
Veröffentlichung
- (wo)
-
Chemnitz, Chemnitz
- (wer)
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Universitätsbibliothek Chemnitz, Technische Universität Chemnitz
- (wann)
-
2016
- Urheber
-
Nallan, Himamshu
Ngo, Thong
Posadas, Agham
Demkov, Alexander
Ekerdt, John
- URN
-
urn:nbn:de:bsz:ch1-qucosa-207142
- Rechteinformation
-
Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Letzte Aktualisierung
-
25.03.2025, 13:47 MEZ
Datenpartner
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Beteiligte
- Nallan, Himamshu
- Ngo, Thong
- Posadas, Agham
- Demkov, Alexander
- Ekerdt, John
- Universitätsbibliothek Chemnitz, Technische Universität Chemnitz
Entstanden
- 2016
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