Hochschulschrift
The Application of Atomic Force Microscopy in Semiconductor Technology - Towards High-K Gate Dielectric Integration
- Alternative title
-
Anwendung der Rasterkraftmikroskopie in der Halbleitertechnololgie - Zur Integration dielektrischer Materialien hoher Permittivität
- Location
-
Deutsche Nationalbibliothek Frankfurt am Main
- Extent
-
Online-Ressource
- Language
-
Englisch
- Notes
-
Darmstadt, Technische Universität Darmstadt, Dissertation, 2011
- Classification
-
Elektrotechnik, Elektronik
- Event
-
Veröffentlichung
- (where)
-
Darmstadt
- (who)
-
Universitäts- und Landesbibliothek Darmstadt
- (when)
-
2012
- Creator
- Contributor
-
Schwalke, Udo
Riechert, Henning
- URN
-
urn:nbn:de:tuda-tuprints-29314
- Rights
-
Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Last update
-
25.03.2025, 1:48 PM CET
Data provider
This object is provided by:
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Object type
- Hochschulschrift
Associated
- Stefanov, Yordan
- Schwalke, Udo
- Riechert, Henning
- Universitäts- und Landesbibliothek Darmstadt
Time of origin
- 2012
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Scanning probe microscopy : atomic force microscopy and scanning tunneling microscopy
Progress in atomic force microscopy
Amplitude modulation atomic force microscopy
Development and properties of all-dielectric and metal-dielectric heterostructures at atomic scale
Photoluminescence intermittency of semiconductor quantum dots in dielectric environments
Investigating bioconjugation by atomic force microscopy
Noncontact atomic force microscopy, [Vol. 1]
Atomic force microscopy of biomimetic systems
Noncontact atomic force microscopy, Vol. 2
Atomic layer processing : semiconductor dry etching technology
High permittivity gate dielectric materials
Atomic Force Microscopy (AFM)
Scanning probe microscopy : atomic force microscopy and scanning tunneling microscopy
Progress in atomic force microscopy
Amplitude modulation atomic force microscopy
Development and properties of all-dielectric and metal-dielectric heterostructures at atomic scale
Photoluminescence intermittency of semiconductor quantum dots in dielectric environments
Investigating bioconjugation by atomic force microscopy
Noncontact atomic force microscopy, [Vol. 1]
Atomic force microscopy of biomimetic systems
Noncontact atomic force microscopy, Vol. 2