Monografie
Al2O3 thin films : relation between structural evolution, mechanical properties and stability
- Sprache
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Englisch
- Anmerkungen
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Aachen, Techn. Hochsch., Diss., 2011
- Identifier
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1019852542
- Reihe
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Materials Chemistry Dissertation; 14 (2011)
Thema
Aluminiumoxide ; PECVD-Verfahren ; Mikrostruktur ; Mechanische Eigenschaft ; Stabilität ; Dünne Schicht , Mechanische Eigenschaft , Thermodynamische Stabilität; Hochschulschrift
Beteiligte Personen und Organisationen
- URN
- Rechteinformation
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Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Letzte Aktualisierung
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26.01.2023, 13:58 MEZ
Objekttyp
- Monografie
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