Hochschulschrift
Al2O3 thin films : relation between structural evolution, mechanical properties, and stability
- Standort
-
Deutsche Nationalbibliothek Frankfurt am Main
- ISBN
-
9783844006179
- Maße
-
21 cm, 189 g
- Umfang
-
XIV, 109 S.
- Sprache
-
Englisch
- Anmerkungen
-
Ill., graph. Darst.
Zugl.: Aachen, Techn. Hochsch., Diss., 2011
- Erschienen in
-
Materials chemistry dissertation ; No. 14
- Schlagwort
-
Aluminiumoxide
PECVD-Verfahren
Mikrostruktur
Mechanische Eigenschaft
Stabilität
Dünne Schicht ; Mechanische Eigenschaft ; Thermodynamische Stabilität
- Inhaltsverzeichnis
- Rechteinformation
-
Bei diesem Objekt liegt nur das Inhaltsverzeichnis digital vor. Der Zugriff darauf ist unbeschränkt möglich.
- Letzte Aktualisierung
- 11.06.2025, 14:14 MESZ
Datenpartner
Dieses Objekt wird bereitgestellt von:
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Objekttyp
- Hochschulschrift
Beteiligte
- Jiang, Kaiyun
- Shaker
Entstanden
- 2011
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