Hochschulschrift
Structure evolution, properties, and application of alumina films deposited by PECVD
- Location
-
Deutsche Nationalbibliothek Frankfurt am Main
- ISBN
-
9783832241766
3832241760
- Dimensions
-
21 cm, 212 gr.
- Extent
-
III, 133 S.
- Language
-
Englisch
- Notes
-
Ill., graph. Darst.
Zugl.: Aachen, Techn. Hochsch., 2005
- Bibliographic citation
-
Materials chemistry dissertation ; No. 02
- Classification
-
Chemie
- Keyword
-
Aluminiumoxide
Dünne Schicht
PECVD-Verfahren
Evolution
- Table of contents
- Rights
-
Bei diesem Objekt liegt nur das Inhaltsverzeichnis digital vor. Der Zugriff darauf ist unbeschränkt möglich.
- Last update
-
11.06.2025, 1:43 PM CEST
Data provider
This object is provided by:
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Object type
- Hochschulschrift
Associated
- Kurapov, Denis
- Shaker
Time of origin
- 2005
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