Passivation and Electrical Properties of Alumina Layers Deposited by Atomic‐Layer Deposition with Different Precursors
- Standort
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Deutsche Nationalbibliothek Frankfurt am Main
- Umfang
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Online-Ressource
- Sprache
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Englisch
- Erschienen in
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Passivation and Electrical Properties of Alumina Layers Deposited by Atomic‐Layer Deposition with Different Precursors ; day:29 ; month:05 ; year:2022 ; extent:6
Physica status solidi / A. A, Applications and materials science ; (29.05.2022) (gesamt 6)
- Urheber
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Kolkovsky, Vladimir
Lange, Nicolas
- DOI
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10.1002/pssa.202200138
- URN
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urn:nbn:de:101:1-2022053015142572023147
- Rechteinformation
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Open Access; Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Letzte Aktualisierung
- 15.08.2025, 07:20 MESZ
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Beteiligte
- Kolkovsky, Vladimir
- Lange, Nicolas
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